发明名称 Second harmonic wave generating device and production method thereof.
摘要 <p>A second harmonic wave generating device having a thin film waveguide layer formed on a substrate, wherein the thin film wave guide layer is formed by dry etching a thin film formed on the substrate to adjust the thickness of the thin film so as to satisfy the following Equation (A) or (B): &lt;MATH&gt; wherein, T mu m: a thickness of the thin film waveguide layer lambda mu m: a fundamental laser wavelength noS1: an ordinary refractive index of the substrate at the fundamental wavelength ( lambda mu m) noF1: an ordinary refractive index of the thin film waveguide layer at the fundamental wavelength ( lambda mu m) neS2: an extraordinary refractive index of the substrate at a second harmonic wavelength ( lambda mu m/2) neF2 an extraordinary refractive index of the thin film waveguide layer at the second harmonic wavelength ( lambda mu m/2) N1 in Equation (A) is &lt;MATH&gt; and N2 in Equation (B) is &lt;MATH&gt; r</p>
申请公布号 EP0432390(A1) 申请公布日期 1991.06.19
申请号 EP19900118670 申请日期 1990.09.28
申请人 IBIDEN CO, LTD. 发明人 ENOMOTO, RYO;YAMADA, MASAYA
分类号 G02F1/37;G02F1/377 主分类号 G02F1/37
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