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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03138944(A)
申请公布日期
1991.06.13
申请号
JP19890275824
申请日期
1989.10.25
申请人
HITACHI LTD
发明人
WAKIMOTO EIJI
分类号
H01L29/73;H01L21/331;H01L29/732
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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