PROCESS FOR PRODUCING THIN-FILM OXIDE SUPERCONDUCTOR.

摘要

A thin-film oxide superconductor is produced by irradiating a target (2) of an oxide superconductor with a laser beam (5) to evaporate the irradiate part, and depositing the evaporated substance (4) on a base (3) to form a thin film while feeding excited oxygen to or near the thin-film formed on the base (3). Thus oxygen atoms are incorporated in the crystal structure of the thin-film to form a thin-film oxide superconductor.