发明名称 |
Apparatus for controlling the composition of a laser gas or gas mixture. |
摘要 |
<p>Apparatus for controlling the composition of a laser gas or gas mixture includes a cryogenic gas-processor (2) connectible to a gas laser (1) selectively to receive gas or a gas mixture therefrom, remove impurities from the gas or gas mixture and selectively return the purified gas or gas mixture to the laser (1). A high temperature gas-purifier (3) is provided in gas flow connection with the processor (2) and with the laser (1) selectively to receive gas or a gas mixture therefrom, remove halogen and/or impurities from the gas or gas mixture and selectively return the dehalogenated or purified gas or gas mixture to the laser (1). Gas analysis means (4) is provided for receiving gas or gas mixture from the laser (1) to analyse it and produce output signals indicative of the actual composition of the laser gas or gas mixture. The output signals are passed to control means (6) operative to compare the actual composition values with desired composition values and operate the processor (2) and/or purifier (3) and/or a clean gas or gas mixture source (5) selectively connectible to the laser (1) to control the laser gas or gas mixture composition. <IMAGE></p> |
申请公布号 |
EP0430411(A2) |
申请公布日期 |
1991.06.05 |
申请号 |
EP19900311035 |
申请日期 |
1990.10.09 |
申请人 |
BRITISH AEROSPACE PUBLIC LIMITED COMPANY |
发明人 |
BEDWELL, DAVID JONATHAN, BRITISH AEROSPACE PUBLIC |
分类号 |
H01S3/097;H01S3/036;H01S3/134;H01S3/225 |
主分类号 |
H01S3/097 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|