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发明名称
Apparatus for treating material by using plasma
摘要
申请公布号
US5021114(A)
申请公布日期
1991.06.04
申请号
US19880221272
申请日期
1988.07.19
申请人
HITACHI, LTD.
发明人
SAITO, HIROSHI;SUZUKI, YASUMICHI;SASABE, SHUNJI;NAKAJIMA, KAZUHIRO
分类号
C23C16/517;H01J37/32
主分类号
C23C16/517
代理机构
代理人
主权项
地址
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