| 发明名称 |
SYNTHETIC DIAMOND VACUUM DEPOSITION APPARATUS WITH CURVED FILAMENT AND BASE SHEET COOLING DEVICE |
| 摘要 |
Diamond is deposited by chemical vapor deposition on two parallel substrates, by means of a plurality of filaments between said substrates. The substrates and filaments are in vertical configuration and the filaments are prestressed to curve in a single plane parallel to the substrates, to allow for thermal expansion and expansion caused by filament carburization. The apparatus includes at least one and preferably two heat sinks to maintain substrate temperature in the range of 900-1000 DEG C, for optimum rate of diamond deposition. |
| 申请公布号 |
JPH03115576(A) |
申请公布日期 |
1991.05.16 |
| 申请号 |
JP19900205338 |
申请日期 |
1990.08.03 |
| 申请人 |
GENERAL ELECTRIC CO <GE> |
发明人 |
TOOMASU RICHIYAADO ANSONII;ROBAATO CHIYAARUSU DEBURIISU;RICHIYAADO AREN ENGURAA;ROBAATO HERUMUUTO ETEINGAA;JIEEMUSU FURUTON FURAISHIYAA |
| 分类号 |
C04B41/87;C23C16/26;C23C16/27;C23C16/44;C23C16/458;C23C16/46;C30B25/10;C30B29/04 |
主分类号 |
C04B41/87 |
| 代理机构 |
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代理人 |
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