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发明名称
THIN FILM DIODE
摘要
申请公布号
JPH03114268(A)
申请公布日期
1991.05.15
申请号
JP19900243856
申请日期
1990.09.17
申请人
JAPAN SYNTHETIC RUBBER CO LTD
发明人
SHIMODA SUGIRO;HARUTA YUICHI;MATSUI SHINGO
分类号
H01L29/861;C23C18/31;H01L29/47;H01L29/872
主分类号
H01L29/861
代理机构
代理人
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