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发明名称
METHOD OF AND APPARATUS FOR OPTICALLY MEASURING DISPLACEMENT
摘要
申请公布号
EP0219127(B1)
申请公布日期
1991.05.08
申请号
EP19860114348
申请日期
1986.10.16
申请人
HITACHI, LTD.
发明人
MORI, SADAO;AKATSU, TOSHIO;MIYAZAKI, CHUUICHI
分类号
G01B9/02;G01D5/26
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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