| 摘要 |
<p>A process to fabricate lightweight ceramic mirrors, and in particular, silicon/silicon carbide mirrors, involves three chemical vapor deposition steps: one to produce the mirror faceplate (104), the second to form the lightweight backstructure (108) which is deposited integral to the faceplate, and the third and final step which results in the deposition of a layer of optical grade material, for example, silicon, onto the front surface of the faceplate. The mirror figure and, finish are fabricated into this latter material.</p> |
