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发明名称
摘要
申请公布号
JPH0345633(U)
申请公布日期
1991.04.26
申请号
JP19890105415U
申请日期
1989.09.11
申请人
发明人
分类号
H01L21/302;H01L21/3065;(IPC1-7):H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
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