发明名称 |
METHOD OF X-RAY GENERATION |
摘要 |
PURPOSE:To efficiently generate x rays by emitting electron beam from an electron gun on the liquid surface of an x-ray generation material using an electro- optic system. CONSTITUTION:An x-ray generation material in fused status is sent to a container 15 from a pipe 17. The x-ray generation material 16 which is sent to the container 15 is heated by a heater 21 and is kept in liquid status. The liquid surface is adjusted up to a preset height by a valve 18. Then a pulse-shaped electron beam 29 is generated by an electron gun 22. This electron beam 29 is formed into a preset beam shape by an electron gun and a deflector 31 and is emitted on the liquid surface of the x-ray generation material 16. As a result, plasma is generated on the liquid surface of the x-ray generation material 16. When the plasma is recombined, x rays are generated by the damping radiation of the electron beam. These generated x rays are externally taken out through the x-ray removal port 20 of the container 15 and the window 33 of a vacuum container 32. |
申请公布号 |
JPS57145257(A) |
申请公布日期 |
1982.09.08 |
申请号 |
JP19810029331 |
申请日期 |
1981.03.03 |
申请人 |
FUJITSU KK |
发明人 |
OKABE MASAHIRO;KITAMURA YOSHITAKA;FURUKAWA YASUO |
分类号 |
H01J35/22;H01J35/08;H01L21/027 |
主分类号 |
H01J35/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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