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发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPH0396231(A)
申请公布日期
1991.04.22
申请号
JP19890233096
申请日期
1989.09.09
申请人
YAMAHA CORP
发明人
TAWARA TAKASHI
分类号
C23F4/00;H01L21/302;H01L21/3065
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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