| 摘要 |
<p>PURPOSE:To set a resistance value arbitrarily and to acquire a compact resistor by forming a conductor which is acquired by irradiating a surface of an insulator substrate composed of high polymer material with an ion beam. CONSTITUTION:A resistance element 1 is formed by irradiating a surface of an insulating substrate 2 which is composed of a high polymer material with an ion beam and by making the irradiated part of the substrate conductive. The larger the mass of the ionic species and the more of the irradiation amount of the ion beam striking the substrate 2 is, the more easily it makes the substrate conductive. That is, an element having a larger mass than He is used as an ionic species. An amount of irradiation ions of 1X10<14> to 1X10<17>ion/cm<2> and the average energy of irradiation ions of 0.8MeV or more are desirable. The element 1 having an arbitrary resistance value can be formed by changing irradiation conditions such as acceleration voltage of the irradiation ion beam, ionic species, and irradiation ion quantity.</p> |
