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发明名称
PATTERN FORMATION BY LIFT-OFF PROCESS
摘要
申请公布号
JPH0391928(A)
申请公布日期
1991.04.17
申请号
JP19890230214
申请日期
1989.09.04
申请人
DAINIPPON PRINTING CO LTD
发明人
ISHIDA TAKEHIKO
分类号
H01L21/302;H01L21/306;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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