| 摘要 |
PURPOSE:To eliminate a decrease in response and unnecessary vibration by so forming protrusions or grooves that the sectional shape of a rail becomes substantially an uneven shape, a trapezoidal shape or a triangular shape. CONSTITUTION:In a linear ultrasonic motor 31, a rail 34 is formed with protrusions 50, grooves 51 are formed on a driver 32 of a contact position with the tail 34 of an ultrasonic driver, and uniform pressing force is applied to the whole contact face of the driver 32. A guide structure of the protrusions 50 and the grooves 51 is formed to prevent lateral deviation, irregular movement even without providing a supporting mechanism at a movable element in the motor 31. As a result, a linear ultrasonic motor having excellent response, less unnecessary vibration can be obtained, and its noise can be reduced. |
