发明名称 |
Charged beam radiation apparatus |
摘要 |
A charged beam radiation apparatus includes an auxiliary charged beam emitting mechanism, a main charged beam emitting mechanism, a secondary electron detector, and a computer as a controller. The auxiliary charged beam emitting mechanism emits an auxiliary charged beam of a given acceleration voltage onto a predetermined portion of an electronic device to be measured. The main charged beam emitting mechanism emits a main charged beam of an acceleration voltage lower than that of the auxiliary charged beam onto the predetermined portion and the vicinity of the predetermined portion. The secondary electron detector detects secondary electrons generated from a portion irradiated by the main charged beam. The controller measures a change in a secondary electron signal from the secondary electron detector.
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申请公布号 |
US5006795(A) |
申请公布日期 |
1991.04.09 |
申请号 |
US19860878015 |
申请日期 |
1986.06.24 |
申请人 |
NIPPON TELEGRAPH & TELEPHONE |
发明人 |
YOSHIZAWA, MASAHIRO;KIKUCHI, AKIRA;WADA, KOU;FUJINAMI, MINPEI;SHIMAZU, NOBUO |
分类号 |
G01Q70/02;G01R31/305;H01J37/26 |
主分类号 |
G01Q70/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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