SUSCEPTOR FOR PULLING UP SINGLE CRYSTAL,申请号JP19890222725-传众专利搜索

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发明名称	SUSCEPTOR FOR PULLING UP SINGLE CRYSTAL
摘要
申请公布号	JPH0383886(A)	申请公布日期	1991.04.09
申请号	JP19890222725	申请日期	1989.08.29
申请人	MITSUBISHI MATERIALS CORP;JAPAN SILICON CO LTD	发明人	NAKAYAMA KOICHI;HARADA KAZUHIRO;SHIMANUKI YASUSHI
分类号	C30B15/00;C30B29/06	主分类号	C30B15/00
代理机构		代理人
主权项
地址

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