| 摘要 |
PURPOSE:To prevent concentration of a discharge at a cold cathode, to reduce cleanup of gas laser medium and to increase its lifetime by enlarging the inner diameter of a through path for connecting a fine conduit formed in a body to the cathode to a size near the inner diameter of the cylinder of the cathode, and forming the length of the path in size of the radius or more of the cathode. CONSTITUTION:A body 14 of a gas laser device is a rectangular parallelepiped block made of a material having a low thermal expansion coefficient such as quartz glass, etc., and a fine conduit 2 is opened in a passing state along the longitudinal direction at the center of the body 14. A first through path 15 is opened on the way of the conduit 2 in a state substantially perpendicular to the radial direction. A cold cathode 6 is concentrically adhered to the opening end 15a of the path 15. The inner diameter of the path 15 is enlarged to a size near the inner diameter of the cylinder 6a of the cathode 6, and the length size B of the path 15 is formed in size of the radius or more of the cylinder 16a of the cathode 6. With this construction, concentration of a discharge can be suppressed to a minimum limit. |
