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发明名称
摘要
申请公布号
JPH0336143(U)
申请公布日期
1991.04.09
申请号
JP19890096903U
申请日期
1989.08.18
申请人
发明人
分类号
H01L21/60;H01L23/28;(IPC1-7):H01L23/28
主分类号
H01L21/60
代理机构
代理人
主权项
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