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经营范围
发明名称
INSPECTION OF PATTERN AND DEVICE THEREOF
摘要
申请公布号
JPH0382135(A)
申请公布日期
1991.04.08
申请号
JP19890219331
申请日期
1989.08.25
申请人
TOSHIBA MACH CO LTD
发明人
WAKASAKI KUNIYOSHI
分类号
H01L21/3205;H01L21/66
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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