摘要 |
PURPOSE:To install at least one set of an ion bombardment chamber and an ionizing chamber without impairing the sensitivity for sensing, by furnishing on ion track a No.1 electrostatic lens, which focuses the ion track on that side of magnetic field facing electric field, and No.2 electrostatic lens on that side of mag. field facing the el. field. CONSTITUTION:The ion track 20 outgoing from an ion source 1 and formed from ionized specimen molecules emitted from a slit 2 is converged by a lens 15 and cast onto a lens 17 via a magnetic field 3. The converged ion track 20 is further throttled by this lens 17 so as to focus at a slit 6, and passes through an ion bombardment chamber 18 and an ionizing chamber 19 without hindrance to undergo meantime neutralization and reionization, and then reaches an ion sensor 9 via the slit 6, electric field 7, and another slit 8. |