VERFAHREN ZUR HERSTELLUNG VON HALBLEITERSUBSTRATEN.
摘要
A new method for GaAs substrate preparation which significantly reduces the formation of oval defects during MBE growth of selectively doped n-AlxGa1-xAs/GaAs heterostructures. The method simply requires treatment in H2SO4 after mechano-chemical polishing in NaOCl solution and generation of a protective surface oxide during in soldering. Routinely a density of oval defects of less than 200 cm-2 is achieved for 2- mu m thick heterostructures. The efficiency of the new preparation procedure is demonstrated by 2DEG mobilities in excess of 106 cm2/Vs at 6K obtained with a spacer width as narrow as 18 nm.
申请公布号
DE3677735(D1)
申请公布日期
1991.04.04
申请号
DE19863677735
申请日期
1986.12.08
申请人
MAX-PLANCK-GESELLSCHAFT ZUR FOERDERUNG DER WISSENSCHAFTEN EV, 3400 GOETTINGEN, DE
发明人
FRONIUS, HANS, D-7000 STUTTGART 80, DE;FISCHER, ALBRECHT, D-7121 LOECHGAU, DE;PLOOG, KLAUS, D-7000 STUTTGART 1, DE