| 摘要 |
Program control transportation of semiconductor wafers (12) or other substrates among a plurality of reaction chambers (28), (29), (30). The apparatus comprises a cassette loadlock (10) for docking a cassette (11) holding a plurality of wafers (12). A first transfert chamber (14) having a plurality of gates (13), (17), (19), one of which is coupled to the cassette loadlock (10), transfers wafers (12) through the plurality of gates (13), (17), (19). A second transfer chamber (24), has a plurality of gates (23), (25), (26), (27) connected to process stations (28), (29), (30). A staging chamber (20) includes incoming and outgoing staging stations (21), (22) and is connected by gates (19), (23) to the first and second transfer stations (14), (24). There are first and second robotic arms (18), (31) in the first and second transfer chambers (14), (24) to transfer wafers (12) between the loadlock (10), the staging chamber (20), and the process stations (28), (29), (30). A monitor system (36) is mounted with the staging chamber (20). The system is modular and can be expanded both vertically and horizontally. |
