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发明名称
PLASMA ETCHING APPARATUS
摘要
申请公布号
JPH0377317(A)
申请公布日期
1991.04.02
申请号
JP19890212127
申请日期
1989.08.19
申请人
TOSHIBA CORP
发明人
ARIKADO TSUNETOSHI
分类号
C23F4/00;H01L21/302;H01L21/3065
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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