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发明名称
METHOD AND APPARATUS FOR MANUFACTURE OF INSULATING FILM
摘要
申请公布号
JPH0366126(A)
申请公布日期
1991.03.20
申请号
JP19890202623
申请日期
1989.08.04
申请人
SHARP CORP
发明人
MIYATAKE HISAKAZU
分类号
C23C8/10;H01L21/316
主分类号
C23C8/10
代理机构
代理人
主权项
地址
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