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发明名称
MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH0348440(A)
申请公布日期
1991.03.01
申请号
JP19890182540
申请日期
1989.07.17
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
MACHIDA KATSUYUKI;MORIE TAKASHI;OIKAWA HIDEO;MINEGISHI KAZUSHIGE
分类号
H01L21/76;H01L27/08
主分类号
H01L21/76
代理机构
代理人
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地址
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