FORMATION OF HIGH-MELTING POINT METALLIC FILM,申请号JP19890181414-传众专利搜索

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发明名称	FORMATION OF HIGH-MELTING POINT METALLIC FILM
摘要
申请公布号	JPH0347965(A)	申请公布日期	1991.02.28
申请号	JP19890181414	申请日期	1989.07.13
申请人	SONY CORP	发明人	SATO JUNICHI
分类号	C23C16/00;C23C16/06;C23C16/511;H01L21/28;H01L21/285	主分类号	C23C16/00
代理机构		代理人
主权项
地址

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