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发明名称
SPIN DRYING APPARATUS
摘要
申请公布号
EP0305402(B1)
申请公布日期
1991.02.27
申请号
EP19870903597
申请日期
1987.05.11
申请人
EASTMAN KODAK COMPANY (A NEW JERSEY CORPORATION)
发明人
KARL, GERALD, MARTIN
分类号
F26B5/08;F26B11/18;F26B21/14;G03F7/16;H01L21/00
主分类号
F26B5/08
代理机构
代理人
主权项
地址
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