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发明名称
PLASMA SPUTTER TYPE NEGATIVE ION SOURCE
摘要
申请公布号
JPH0325835(A)
申请公布日期
1991.02.04
申请号
JP19890161774
申请日期
1989.06.23
申请人
NISSIN HIGH VOLTAGE CO LTD
发明人
BABA TAKASHI;FUKUSHIMA EIJI
分类号
H01J27/20;H01J37/08
主分类号
H01J27/20
代理机构
代理人
主权项
地址
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