LOAD-LOCK CHAMBER,申请号JP19890157720-传众专利搜索

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发明名称	LOAD-LOCK CHAMBER
摘要
申请公布号	JPH0322424(A)	申请公布日期	1991.01.30
申请号	JP19890157720	申请日期	1989.06.19
申请人	NEC KYUSHU LTD	发明人	FUKUSHIMA TAKAMOTO
分类号	C23C14/56;H01L21/205;H01L21/302;H01L21/3065	主分类号	C23C14/56
代理机构		代理人
主权项
地址

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