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发明名称
PRODUCTION DEVICE OF SINGLE CRYSTAL OF COMPOUND SEMICONDUCTOR
摘要
申请公布号
JPH0316988(A)
申请公布日期
1991.01.24
申请号
JP19890151350
申请日期
1989.06.14
申请人
HITACHI CABLE LTD
发明人
MIZUNIWA SEIJI;KURIHARA TORU;HATTORI AKIO;KASHIWA MIKIO
分类号
C30B11/00;H01L21/208
主分类号
C30B11/00
代理机构
代理人
主权项
地址
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