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发明名称
Method for providing improved insulation in VLSI and ULSI circuits
摘要
申请公布号
US4987101(A)
申请公布日期
1991.01.22
申请号
US19880286443
申请日期
1988.12.16
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
KAANTA, CARTER W.;ROBERTS, STANLEY
分类号
H01L21/768;H01L23/522
主分类号
H01L21/768
代理机构
代理人
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