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发明名称
PRODUCTION OF THIN FILM
摘要
申请公布号
JPH0310073(A)
申请公布日期
1991.01.17
申请号
JP19890144102
申请日期
1989.06.08
申请人
TOSHIBA CORP
发明人
OIDOME TERUKI
分类号
C23C14/40
主分类号
C23C14/40
代理机构
代理人
主权项
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