PRODUCTION DEVICE OF SILICON SINGLE CRYSTAL

摘要

PURPOSE:To prevent the defects of crystal from being generated by pertitioning the crucible receiving molten Si raw material to inside of single crystal growing part and outside of raw material melting part to devide the Si raw material with the partitioning material consisting of opaque quartz glass. CONSTITUTION:Granular raw material 6 is supplied to the raw material melting part A from a raw material supply unit 5. The partitioning member 8 made of opaque quartz glass is coaxially provided in a quartz crucible 1 set in a graphite crucible 2. Small apertures 9 are provided in this partition member 8 so that the molten raw material 7 in the raw material melting part A flows into the single crystal growing part B through these apertures 9. The molten raw material 7 is grown into a pillar-shaped grown single crystal 4 to be pulled up. Thus, the single crystal free from fine defects is obtained.