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发明名称
VAPOR PHASE ETCHING
摘要
申请公布号
JPH033236(A)
申请公布日期
1991.01.09
申请号
JP19890137064
申请日期
1989.05.30
申请人
FURUKAWA ELECTRIC CO LTD:THE
发明人
IJICHI TETSURO;OKAMOTO HIROSHI
分类号
H01L21/302;H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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