| 摘要 |
PURPOSE:To obtain an array-type ultrasonic probe, which is free from defectives accompanied by formation of earth and equipped with an earth construction without any restrictions on spacing between elements, by forming a matching layer, while remaining part of piezoelectric substance, dicing it and then connecting together the divided exposed parts with an electrically conductive cement so as to form the earth. CONSTITUTION:Matching layers 4 are formed while a specified width A of piezoelectric substances (piezoelectric ceramics) 1 in thickness direction are exposed as electrode exposed parts 10. These electrode exposed parts 10 are connected together by an electrically conductive cement such as electrically conductive paste, electrically conductive coating and soft solder to form an earth. With this construction, because it is possible to form a matching layer 4 and to divide it (dicing) before forming the earth, causes of defectives such as peeling of the matching layer 4 accompanied by dicing due to the earth matter and short circuit of signal wires due to chips can be avoided and a restriction on spacing between elements due to metal mesh is also avoided. |
