| 摘要 |
PURPOSE:To improve productivity of ceramic substrate by alternately piling ceramic green sheets and setters having low reactivity and plural through holes and calcining. CONSTITUTION:Green sheets 11 such as SrTiO3-CaTiO-based dielectric ceramic having about 0.3-0.5mm thickness and setters 12 such as highpurity Al2O3 substrates having about 1.0mm thickness and about 300 through holes with about 1.0mm diameter and low reactivity are alternately piled and calcined at about 1,300 deg.C for about 2 hours to give ceramic substrates having improved crystallizability. The similar ceramic substrates are obtained by forming green sheets having about 1.0mm thickness and the same composition as that of the ceramic green sheets, forming through holes with about 1.0mm diameters, calcining the sheets at about 1,350 deg.C, higher than the proper calcining temperature for about 2 hours to give substrates and using the prepared substrates as the setters 12. |
