Microwave energy coupling and distribution device in an exciter for plasma production.

摘要

- Production of a plasma. - The device for coupling and distributing microwave energy in at least one exciter is characterised in that it comprises: . a first enclosure (1) in which the microwave energy prevails, . a second enclosure (4) containing a gaseous medium to be ionised, . a first series of at least one communication passage (7) between the two enclosures (1, 4), . and, for each communication passage (7), an exciter (13) mounted so as to pass through the passage some distance from the inner surface of the latter and so as to extend, on the one hand, at least inside the first enclosure (1) in order to couple part of the microwave energy, and, on the other hand, at least inside the second enclosure (4) in order to locally conduct the microwave energy coupled in connection with the gaseous medium. - Application to the excitation of a plasma by microwaves. <IMAGE>