Robot for clean room use having contaminant particle-removal system incorporated therein

摘要

Multi-jointed robot for use in a clean room specifically applicable during the production of semiconductor devices where contaminant material must be eliminated to the extent possible. The robot includes a sectional body defined at least in part by a plurality of arm members wherein a plurality of pivotal joints are provided to pivotably connect adjacent arm members with respect to each other. The arm members and the pivotal joints are hollow such that an uninterrupted air passage is provided in the robot extending through each of the pivotal joints and the arm members of the sectional body thereof. The robot includes a terminal arm member located at one end of the sectional body which has an opening on the exterior surface thereof defining one end of the air passage through the robot. A rotary fan is mounted in the robot at the other end of the air passage and is operable upon rotation to exhaust air through the air passage within the interior of the sectional body of the robot. The air flow along the passage within the interior of the sectional body of the robot carries any contaminant particles if present due to frictional wear between moving components of the pivotal joints along the air passage to the exterior of the sectional body of the robot, thereby removing the particles as a source of contamination.