发明名称 A slicing and grinding system for a wafer slicing machine.
摘要 <p>A grinding wheel (28) is mounted coaxially of an internal diameter saw blade (24) and rotates with the saw blade (24) during operation. The grinding wheel (28) includes a grinding disc (30) and a center rod (32) which is movably mounted within a central bore (17) of the spindle (16) of the slicing machine. Compressed fluid such as air is used to move the grinding wheel (28) from a retracted position to an extended position against the bias of a spring (33) secured to the center rod. The pressurized fluid is introduced into a chamber (40) for moving an annular sleeve-like piston (38) removably secured to the grinding disc (30). An adjustable stop ring (44) is also mounted on an adaptor (18) within the sleeve-like piston (38) and has ears (48) which can be deflected by screws (50) from access openings in the grinding disc (30) for fine running adjustments of the grinding disc (30). This stop ring (44) can be accessed upon removal of the grinding disc (30) from the center rod (32) and sleeve-like piston (38) in order to permit coarse initial adjustments in the positioning of the grinding disc (30).</p>
申请公布号 EP0398467(A2) 申请公布日期 1990.11.22
申请号 EP19900301502 申请日期 1990.02.13
申请人 SILICON TECHNOLOGY CORPORATION 发明人 STEERE, ROBERT E., JR.
分类号 B24B7/16;B24B1/00;B24B7/22;B24B27/06;B28C5/02;B28D1/00;B28D5/00;B28D5/02;H01L21/304 主分类号 B24B7/16
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