MAGNETIC BEARING FOR A FAST ROTATING VACUUM PUMP

摘要

The invention describes a system of magnetic bearings for high speed rotary vacuum pumps, having two radially centering passive magnetic bearings, which originate axially destabilizing forces and thus an unstable point. The axial position is regulated by an electrical solenoid and the operational point of the radial bearing is axially shifted with reference to the unstable point in direction of a high vacuum flange. One of two emergency bearings is located on a high vacuum end and the other is arranged on a fore-vacuum end between the solenoid and the lower passive radial bearing, the rotor, solenoid and position sensor being arranged so as to insure an easy adjustability of the rotor.