发明名称 |
VAPORIZER SYSTEM FOR ION SOURCE |
摘要 |
VAPORIZER SYSTEM FOR ION SOURCE A vaporizer system for an ion source includes a radiation source positioned on the vaporizer axis for providing radiation, multiple crucibles radially spaced from the axis and circumferentially spaced from each other and a reflector rotatable about the axis for directing radiation from the source at a selected one of the crucibles. The radiation causes heating of the selected crucible and vaporization of a solid source material contained therein. The radiation source is a visible and/or infrared emitting lamp such as a quartz halogen lamp. The crucibles are thermally isolated from each other by a heat shield so that the selected crucible is heated while the others remain relatively cool. |
申请公布号 |
CA1276319(C) |
申请公布日期 |
1990.11.13 |
申请号 |
CA19880566828 |
申请日期 |
1988.05.13 |
申请人 |
VARIAN ASSOCIATES INC. |
发明人 |
SATOH, SHU;EVANS, LOUIS E., JR. |
分类号 |
H01J27/20;H01J27/02;H01J27/26;H01J37/08;H01J49/04 |
主分类号 |
H01J27/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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