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经营范围
发明名称
DIFFUSION FURNACE DEVICE
摘要
申请公布号
JPH02276242(A)
申请公布日期
1990.11.13
申请号
JP19890098004
申请日期
1989.04.17
申请人
NEC KYUSHU LTD
发明人
SASAHARA KATSUYUKI
分类号
H01L21/22
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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