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发明名称
APPARATUS AND METHODS FOR SEMICONDUCTOR WAFER TESTING
摘要
申请公布号
EP0201205(B1)
申请公布日期
1990.11.07
申请号
EP19860302565
申请日期
1986.04.07
申请人
PROMETRIX CORPORATION
发明人
MALLORY, CHESTER;PERLOFF, DAVID STEVEN;HUNG, VAN PHAM;DROBLISCH, SANDOR
分类号
G01R27/00;H01L21/66;G01R31/28;H01L21/68
主分类号
G01R27/00
代理机构
代理人
主权项
地址
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