| 摘要 |
<p>PURPOSE:To coat the inner surface of a bent pipe with a film in uniform thickness distribution by assembling the intermediate split target elements having a circular cross section and a trapezoidal side surface in conformity to the curve of the bent pipe. CONSTITUTION:A thin film is formed on the inner surface of a 90 deg. bent pipe 1 by sputtering. Accordingly, the plural intermediate split target elements 2a-2e having a circular cross section of the same diameter and a trapezoidal side surface are connected. Meanwhile, terminal targets 4a and 4e having a rectangular side surface are joined to the intermediate split targets 2a and 2e by connecting screws 6 and 7 at the center of the cross section. The targets are thus assembled in conformity to the curve of the bent pipe 1 into a shape occupying practically the center line of the inner surface in the bent pipe 1. By this method, the inner surface of the bent pipe is coated with a thin film resistant to corrosion and wear in a short time.</p> |
