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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH02271537(A)
申请公布日期
1990.11.06
申请号
JP19890093577
申请日期
1989.04.12
申请人
MITSUBISHI ELECTRIC CORP
发明人
OKU TOMOKI
分类号
H01L29/812;H01L21/265;H01L21/338;H01L29/08
主分类号
H01L29/812
代理机构
代理人
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地址
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