WIRING LAYER OF SEMICONDUCTOR DEVICE,申请号JP19890094171-传众专利搜索

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发明名称	WIRING LAYER OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH02271633(A)	申请公布日期	1990.11.06
申请号	JP19890094171	申请日期	1989.04.13
申请人	HITACHI LTD	发明人	FUKADA SHINICHI;KAWABUCHI YASUSHI;SUWA MOTOHIRO;SHIODA KATSUHIKO;NIHEI MASAYASU;ONUKI HITOSHI;MIYAZAKI KUNIO;ITAGAKI TATSUO
分类号	H01L23/52;H01L21/3205	主分类号	H01L23/52
代理机构		代理人
主权项
地址

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