| 摘要 |
PURPOSE:To easily form a thermally sprayed film which is dense and has excellent surface smoothness on the inside surface of a capillary by reducing the pressure in the capillary at the time of forming the film by a wire explosion spraying method on the inside surface of the capillary. CONSTITUTION:Holed plugs 11, 12 are mounted to both ends of the capillary 10 consisting of various metals, ceramics, glass, etc., and a gas introducing tube 13 and a gas suction tube 14 are respectively inserted therein. A wire rod 15 consisting of a conductive metallic wire or conductive ceramics, such as WC, is mounted with the tube 13 and the tube 14 as electrodes. The inside of the capillary 10 is evacuated by the gas suction tube 14 to reduce the pressure down to about 50 to 400Torr; thereafter, a switch 24 of a wiring 16 having a power source 23, such as capacitor of a large capacity, to pass a large current to the wire rod 15 to explosively melt the rod 15 and thermally sprayed film consisting of the wire rod 15 is formed on the inside surface of the capillary 10. Since the inside of the capillary 10 is in a reduced pressure state, the dense thermally sprayed film having the good surface smoothness is formed on the inside surface thereof. The wire explosion spraying of easily oxidizable metals, such as Ti, Nb, and Ta, with which the wire explosion spraying is heretofore infeasible, is possible. |
