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发明名称
METHOD FOR REMOVING DEPOSITED FILM IN VACUUM THIN FILM FORMING EQUIPMENT
摘要
申请公布号
JPH02259064(A)
申请公布日期
1990.10.19
申请号
JP19890082701
申请日期
1989.03.31
申请人
PENTEL KK
发明人
HIROKI HIROSHI
分类号
C23C14/22;C23C14/00
主分类号
C23C14/22
代理机构
代理人
主权项
地址
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