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经营范围
发明名称
Plasma etching apparatus
摘要
申请公布号
US4963242(A)
申请公布日期
1990.10.16
申请号
US19890354906
申请日期
1989.05.19
申请人
NIPPON TELEGRAPH AND TELEPHONE CORPORATION
发明人
SATO, MASAAKI;ARITA, YOSHINOBU
分类号
H01J37/32;H01J37/34
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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